Browsing by author "Armour, D.G>"
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High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
van den Berg, J.A.; Reading, M.A.; Armour, D.G>; Bailey, P.; Noakes, T.C.Q.; Conard, Thierry; De Gendt, Stefan (2009)