Publication:
High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
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1897 since deposited on 2021-10-18
2last month
Acq. date: 2026-10-12
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Statistics
Views
1897 since deposited on 2021-10-18
2last month
Acq. date: 2026-10-12
Citations