Publication:
High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
Date
| dc.contributor.author | van den Berg, J.A. | |
| dc.contributor.author | Reading, M.A. | |
| dc.contributor.author | Armour, D.G> | |
| dc.contributor.author | Bailey, P. | |
| dc.contributor.author | Noakes, T.C.Q. | |
| dc.contributor.author | Conard, Thierry | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.imecauthor | Conard, Thierry | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-18T03:59:30Z | |
| dc.date.available | 2021-10-18T03:59:30Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/16362 | |
| dc.source.conference | 19th Ion Beam Analysis Conference - IBA | |
| dc.source.conferencedate | 7/09/2009 | |
| dc.source.conferencelocation | Cambridge UK | |
| dc.title | High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS) | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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