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High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
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1890 since deposited on 2021-10-18
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Acq. date: 2025-10-25
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Views
1890 since deposited on 2021-10-18
419item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations