Browsing by author "Nakamura, K."
Now showing items 1-3 of 3
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High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Naito, Yasuyuki; Helin, Philippe; Nakamura, K.; De Coster, Jeroen; Guo, Bin; Haspeslagh, Luc; Onishi, K.; Tilmans, Harrie (2010) -
The present status of high-Tc superconducting terahertz emitters
Kashiwagi, T.; Kubo, H.; Sakamoto, K.; Yuasa, T.; Tanabe, Y.; WatanC.abe,; Tanaka, T.; Komori, Y.; Ota, R.; Kuwano, G.; Nakamura, K.; Katsuragawa, T.; Tsujimoto, M.; Yamamoto, Takashi; Yoshizaki, R.; Minami, H.; Kadowaki, K.; Klemm, R.A. (2017) -
Torsional mode MEMS resonator using thin film vacuum package
Onishi, K.; Naito, Yasuyuki; Yamakawa, T.; Nakamura, K.; Helin, Philippe; De Coster, Jeroen; Haspeslagh, Luc; Tilmans, Harrie (2012)