Publication:
High-Q torsional mode Si triangular beam resonators encapsulated using SiGe thin film
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1975 since deposited on 2021-10-18
Acq. date: 2026-01-09
Citations
Metrics
Views
1975 since deposited on 2021-10-18
Acq. date: 2026-01-09
Citations