Browsing by author "Otten, Ronald"

Now showing items 1-2 of 2

Intra-field mask-to-mask overlay, separating the mask writing from the dynamic pellicle contribution

van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Otten, Ronald; Beyer, Dirk (2018)
Intra-field stress impact on global wafer deformation

van Haren, Richard; Otten, Ronald; Singh, Subodh; Singh, Amandev; Van Dijk, Leon; Owen, David; Anberg, Doug; Mileham, Jeffrey; Gu, Yajun; Hermans, Jan (2019)