Browsing by author "Schade, K."
Now showing items 1-3 of 3
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Dry processing for crystalline silicon solar cells
Agostinelli, Guido; De Wolf, Stefaan; Dekkers, Harold; Beaucarne, Guy; Le, Q.N.; Goldbach, H.D.; Schropp, R.E.I.; Pinter, I.; Walther, G.; Schade, K.; Vitanov, P.; Vukadinovic, M.; Topic, M. (2003) -
In-line plasma surface etching and PECVD SiNX:H deposition for crystalline Si solar cell processing
De Wolf, Stefaan; Schade, K.; Dekkers, Harold; Beaucarne, Guy (2005) -
Very high frequency PECVD SiNx:H for fast deposition of anti-reflection coating and passivation of mc-Si solar cells
Dekkers, Harold; De Wolf, Stefaan; Agostinelli, Guido; Beaucarne, Guy; Stahr, F.; Stephan, U.; Kuske, J.; Schade, K. (2004)