Browsing by author "Xie, Q."

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Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices

Arimura, Hiroaki; Ragnarsson, Lars-Ake; Oniki, Yusuke; Franco, Jacopo; Vandooren, Anne; Brus, Stephan; Leonhardt, A.; Sippola, P.; Ivanova, T.; Verni, G. Alessio; Chang, R-J; Xie, Q.; Givens, M.; Mitard, Jerome; Biesemans, Serge; Dentoni Litta, Eugenio; Horiguchi, Naoto (2021)
Texture of atomic layer deposited ruthenium

Musschoot, J.; Xie, Q.; Deduytsche, D.; De Keyser, K.; Longrie, D.; Haemers, J.; Van den Berghe, S.; Van Meirhaeghe, R.L.; D'Haen, Jan; Detavernier, C. (2010)