Texture of atomic layer deposited ruthenium

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Authors

Musschoot, J.; Xie, Q.; Deduytsche, D.; De Keyser, K.; Longrie, D.; Haemers, J.; Van den Berghe, S.; Van Meirhaeghe, R.L.; D'Haen, Jan; Detavernier, C.

ISSN

0167-9317

Issue

10

Journal

Microelectronic Engineering

Volume

87

Title

Texture of atomic layer deposited ruthenium

Publication type

Journal article

Embargo date

9999-12-31

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