Publication:

Texture of atomic layer deposited ruthenium

Date

2010
Journal article
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Author(s)

Musschoot, J.
;
Xie, Q.
;
Deduytsche, D.
;
De Keyser, K.
;
Longrie, D.
;
Haemers, J.
;
Van den Berghe, S.
;
Van Meirhaeghe, R.L.
;
D'Haen, Jan  
;
Detavernier, C.

Journal

Microelectronic Engineering

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