Browsing by author "Yoshida, Y."

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Selective wet etching in fabricating SiGe and Ge nanowires for gate-all-around MOSFETs

Liu, W.D.; Lee, Y.C.; Sekiguchi, R.; Yoshida, Y.; Komori, K.; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank (2018)
Surface preparation and wet cleaning for germanium surface

Shirakawa, Hajime; Snow, j.; Otsuji, M.; Yoshida, Y.; Takahashi, H.; Sebaai, Farid; Holsteyns, Frank; Sato, M. (2017)