Browsing by author "Lampin, E."
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Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Cristiano, F.; Claverie, A.; Duffy, Ray; Pawlak, Bartek; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C. (2004)