Authors

Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Cristiano, F.; Claverie, A.; Duffy, Ray; Pawlak, Bartek; Ortiz, C.J.; Pichler, P.; Lampin, E.; Zechner, C.

Conference

Silicon Front-End Junction Formation - Physics and Technology

Title

Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions

Publication type

Proceedings paper