Browsing by author "Adel, Mike"
Now showing items 1-5 of 5
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Critical-dimension metrology for integrated circuit technology
Marchman, Herschel; Lorusso, Gian; Adel, Mike; Yedur, Sanjay (2007) -
Diffraction based overlay metrology: accuracy and performance on front end stack
Leray, Philippe; Cheng, Shaunee; Kandel, Daniel; Adel, Mike; Marchelli, Anat; Vakshtein, Irina; Vasconi, Mauro; Salski, Bartlomiej (2008) -
In field overlay uncertainty contributors
Frommer, Aviv; Kassel, Elyakim; Izikson, Pavel; Adel, Mike; Leray, Philippe; Shultz, Bernd (2005) -
In-chip overlay metrology in 90 nm production
Schultz, Bernd; Seltmann, Rolf; Paufler, Joerg; Leray, Philippe; Kassel, Elyakim; Adel, Mike; Izikson, Pavel; Frommer, Aviv (2005) -
Overlay metrology for double patterning processes
Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauri; Salski, Bartlomiej (2009)