In-chip overlay metrology in 90 nm production

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Authors
Schultz, Bernd; Seltmann, Rolf; Paufler, Joerg; Leray, Philippe; Kassel, Elyakim; Adel, Mike; Izikson, Pavel; Frommer, Aviv
Conference
International Symposium Semiconductor Manufacturing
Title
In-chip overlay metrology in 90 nm production
Publication type
Proceedings paper
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