Browsing by author "Christian, Zuniga"

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Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration

Lorusso, Gian; Van Roey, Frieda; Hendrickx, Eric; Fenger, Germain; Lam, Michael; Christian, Zuniga; Habib, Mohamed; Diab, Hesham; Word, James (2009)