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Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration
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Authors
Lorusso, Gian
;
Van Roey, Frieda
;
Hendrickx, Eric
;
Fenger, Germain
;
Lam, Michael
;
Christian, Zuniga
;
Habib, Mohamed
;
Diab, Hesham
;
Word, James
Issue
4
Journal
Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume
8
Title
Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration
Publication type
Journal article
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