Authors

Lorusso, Gian; Van Roey, Frieda; Hendrickx, Eric; Fenger, Germain; Lam, Michael; Christian, Zuniga; Habib, Mohamed; Diab, Hesham; Word, James

Issue

4

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volume

8

Title

Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration

Publication type

Journal article