Browsing by author "Menzel, D."
Now showing items 1-1 of 1
-
Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior
Schmolke, R.; Blietz, M.; Hölzl, R.; Menzel, D.; Bender, Hugo (2002)
Now showing items 1-1 of 1