Publication:
Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior
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1986 since deposited on 2021-10-14
7last month
1last week
Acq. date: 2026-05-16
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Statistics
Views
1986 since deposited on 2021-10-14
7last month
1last week
Acq. date: 2026-05-16
Citations