Publication:
Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior
Date
| dc.contributor.author | Schmolke, R. | |
| dc.contributor.author | Blietz, M. | |
| dc.contributor.author | Hölzl, R. | |
| dc.contributor.author | Menzel, D. | |
| dc.contributor.author | Bender, Hugo | |
| dc.contributor.imecauthor | Bender, Hugo | |
| dc.date.accessioned | 2021-10-14T23:04:27Z | |
| dc.date.available | 2021-10-14T23:04:27Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6800 | |
| dc.source.beginpage | 658 | |
| dc.source.conference | Semiconductor Silicon 2002. Proceedings of the 9th International Symposium on Silicon Materials Science and Technology | |
| dc.source.conferencedate | 12/05/2002 | |
| dc.source.conferencelocation | Philadelphia, PA USA | |
| dc.source.endpage | 669 | |
| dc.title | Bulk micro defects of p/p epitaxial silicon wafers with nitrogen doped substrates and their gettering behavior | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |