Browsing by author "Rosslee, Craig"
Now showing items 1-5 of 5
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Analysis of the effect of point-of-use filtration on microbridging defectivity
Braggin, Jennifer; Gronheid, Roel; Cheng, Shaunee; Van Den Heuvel, Dieter; Bernard, Sophie; Foubert, Philippe; Rosslee, Craig (2009) -
Characterizing immersion lithography micro bridge defects using advanced features of teh SEMVision G3 STAR FIB
Van Den Heuvel, Dieter; Santoro, Gaetano; Gronheid, Roel; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Schreutelkamp, Rob; Hillel, Noam (2009) -
Cluster optimization to improve total CD control as an enabler for double patterning
Laidler, David; D'have, Koen; Rosslee, Craig; Tedeschi, Len (2008) -
Micro-bridge defects: characterization and root cause analysis
Santoro, Gaetano; Van Den Heuvel, Dieter; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Jehoul, Christiane; Schreutelkamp, Rob; Hillel, Noam (2010) -
Track optimization and control for 32nm node double patterning and beyond
Laidler, David; Rosslee, Craig; D'have, Koen; Leray, Philippe; Tedeschi, Len (2009)