Browsing by author "Haug, Rainer"
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Application of moist ozone gas phase for removal of resist and organic contamination in a novel tank type processor
Wolke, K.; Riedel, T.; Haug, Rainer; De Gendt, Stefan; Heyns, Marc; Meuris, Marc (2000) -
Application of moist ozone gasphase for removal of resist and organic contamination in a novel tank-type processor
Haug, Rainer; Cornelissen, Ingrid; Claes, Martine; De Gendt, Stefan; Wolke, K.; Meuris, Marc; Heyns, Marc (1999)