Browsing by author "Vannuffel, Cyril"

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Microstepper vs. interference EUV lithography: effects on resist profiles

Gronheid, Roel; Van Roey, Frieda; Goethals, Mieke; Solak, Harun H.; Ekinci, Yasin; van Ingen Schenau, Koen; Vannuffel, Cyril; Jouve, Amandine (2005)