Publication:

Microstepper vs. interference EUV lithography: effects on resist profiles

Date

2005

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Van Roey, Frieda

;

Goethals, Mieke

;

Solak, Harun H.

;

;

van Ingen Schenau, Koen

;

Vannuffel, Cyril

;

Jouve, Amandine

Statistics

1925 since deposited on 2021-10-16

1last month

Acq. date: 2026-02-24