Publication:

Microstepper vs. interference EUV lithography: effects on resist profiles

Date

2005

Proceedings Paper

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Author(s)

;

Van Roey, Frieda

;

Goethals, Mieke

;

Solak, Harun H.

;

;

van Ingen Schenau, Koen

;

Vannuffel, Cyril

;

Jouve, Amandine

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Acq. date: 2026-09-14