Browsing by author "Wang, Mugwort"
Now showing items 1-3 of 3
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Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on silicon
Wang, Mugwort; Badylevich, M.; Adelmann, Christoph; Swerts, Johan; Kittl, Jorge; Afanasiev, Valeri (2012) -
Injection and trapping of electrons in Y2O3 layers on Si
Wang, Mugwort; Badylevich, M.; Afanasiev, Valeri; Stesmans, Andre; Adelmann, Christoph; Van Elshocht, Sven; Kittl, Jorge; Lukosius, M.; Walczyk, C.; Wenger, C. (2010) -
Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis
Tomida, Kazuyuki; Popovici, Mihaela Ioana; Swerts, Johan; Wang, Mugwort; Kaczer, Ben; Pawlak, Malgorzata; Van Elshocht, Sven; Kim, Min-Soo; Debusschere, Ingrid; Afanasiev, Valeri; Altimime, Laith; Kittl, Jorge (2011)