Authors

Wang, Mugwort; Badylevich, M.; Adelmann, Christoph; Swerts, Johan; Kittl, Jorge; Afanasiev, Valeri

Conference

E-MRS Spring Meeting Symposium M: More than Moore: Novel Materials Approaches for Functionalized Silicon Based Microelectronics

Title

Electron trap energy distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 layers on silicon

Publication type

Proceedings paper

Embargo date

9999-12-31