Publication:
Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1899 since deposited on 2021-10-19
Acq. date: 2026-06-12
Citations
Statistics
Views
1899 since deposited on 2021-10-19
Acq. date: 2026-06-12
Citations