Authors

Tomida, Kazuyuki; Popovici, Mihaela Ioana; Swerts, Johan; Wang, Mugwort; Kaczer, Ben; Pawlak, Malgorzata; Van Elshocht, Sven; Kim, Min-Soo; Debusschere, Ingrid; Afanasiev, Valeri; Altimime, Laith; Kittl, Jorge

Conference

International Conference on Solid-State Devices and Materials - SSDM

Title

Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis

Publication type

Proceedings paper