Publication:

Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis

Date

2011

Proceedings Paper

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Author(s)

Tomida, Kazuyuki

;

Popovici, Mihaela Ioana

;

;

;

;

Pawlak, Malgorzata

;

Van Elshocht, Sven

;

;

Debusschere, Ingrid

;

Afanasiev, Valeri

;

Altimime, Laith

;

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Acq. date: 2026-02-27