Publication:
Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis
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1899 since deposited on 2021-10-19
2last month
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Acq. date: 2026-04-07
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Statistics
Views
1899 since deposited on 2021-10-19
2last month
1last week
Acq. date: 2026-04-07
Citations