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Process development of ALD-rutile-TiO2/Ru(Ox) for DRAM MIMcap application and its leakage mechanism analysis
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1895 since deposited on 2021-10-19
Acq. date: 2025-12-10
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Views
1895 since deposited on 2021-10-19
Acq. date: 2025-12-10
Citations