Browsing by author "Wurm, Stephan"

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Driving the industry towards a consensus on high numerical aperture (High-NA) extreme ultraviolet (EUV)

Kearney, Patrick; Wood, Obert; Hendrickx, Eric; McIntyre, Greg; Soichi, Inoue; Goodwin, Frank; Wurm, Stephan; Van Schoot, Jan; Kaiser, Winfried (2014)