Browsing by author "Yasui, Naoki"

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Application of model-based library approach to photoresist pattern shape measurement in advenced lithography

Yasui, Naoki; Isawa, Miki; Ishimoto, Toru; Sekiguchi, Kohei; Tanaka, Maki; Osaki, Mayuka; Shishido, Chie; Hasegawa, Norio; Cheng, Shaunee (2010)
Study on practical application of pattern top resist loss measurement by CD-SEM for high NA immersion lithography

Ishimoto, Toru; Yasui, Naoki; Hasegawa, Norio; Tanaka, Maki; Cheng, Shaunee (2010)