Browsing by author "Roeckerath, Martin"
Now showing items 1-2 of 2
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Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition
Adelmann, Christoph; Lehnen, Peer; Van Elshocht, Sven; Zhao, Chao; Brijs, Bert; Franquet, Alexis; Conard, Thierry; Roeckerath, Martin; Schubert, Jurgen; Boissiere, Olivier; Lohe, Christoph; De Gendt, Stefan (2007-10) -
Liquid injection MOCVD of dysprosium scandate films. Deposition characteristics and high-k applications
Thomas, Reji; Ehrhart, Peter; Roeckerath, Martin; Van Elshocht, Sven; Rije, Eduard; Luysberg, Martina; Boese, Markus; Schubert, Jürgen; Caymax, Matty; Waser, Rainer (2007)