Authors

Adelmann, Christoph; Lehnen, Peer; Van Elshocht, Sven; Zhao, Chao; Brijs, Bert; Franquet, Alexis; Conard, Thierry; Roeckerath, Martin; Schubert, Jurgen; Boissiere, Olivier; Lohe, Christoph; De Gendt, Stefan

Journal

Chemical Vapor Deposition

Volume

13

Title

Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition

Publication type

Journal article