Publication:

Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition

Date

2007

Journal article

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Author(s)

Adelmann, Christoph

;

;

Van Elshocht, Sven

;

;

;

Franquet, Alexis

;

Conard, Thierry

;

Roeckerath, Martin

;

Schubert, Jurgen

;

Boissiere, Olivier

;

Lohe, Christoph

;

De Gendt, Stefan

Journal

Chemical Vapor Deposition

Statistics

1989 since deposited on 2021-10-16

Acq. date: 2026-07-26