Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition

Adelmann, Christoph; Lehnen, Peer; Van Elshocht, Sven; Zhao, Chao; Brijs, Bert; Franquet, Alexis; Conard, Thierry; Roeckerath, Martin; Schubert, Jurgen; Boissiere, Olivier; Lohe, Christoph; De Gendt, Stefan

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Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition

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2007-10

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Chemical Vapor Deposition

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Growth of dysprosium-, scandium-, and hafnium-based third generation high-k dielectrics by atomic-vapor deposition

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