Browsing by author "Lafosse, Anne"
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Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography
Rathore, Ashish; Cipriani, Maicol; Huang, Ching-Chung; Amiaud, Lionel; Dablemont, Celine; Lafosse, Anne; Ingolfsson, Oddur; De Simone, Danilo; De Gendt, Stefan (2021)