Browsing by author "Fruehauf, Jens"
Now showing items 1-9 of 9
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An (un)solvable problem in SIMS: B-interfacial profiling
Vandervorst, Wilfried; Janssens, Tom; Loo, Roger; Caymax, Matty; Peytier, Ivan; Lindsay, Richard; Fruehauf, Jens; Bergmaier, A.; Dollinger, G. (2003) -
Assessment of the near-surface profiling capabilities of SIMS
Vandervorst, Wilfried; Janssens, Tom; Fruehauf, Jens; Ross, I.M.; Cullis, A.; Vandenberg, J.A.; Bergmaier, A.; Dollinger, G. (2003) -
Characterization of the B and As pile-up at the Si-SiO2 interface
Fruehauf, Jens; Lindsay, Richard; Vandervorst, Wilfried; Maex, Karen; Bergmaier, A.; Dollinger, G.; Koch, F. (2003) -
Effect of implant oxide on ultra-shallow junction formation
Lindsay, Richard; Lauwers, Anne; Fruehauf, Jens; de Potter de ten Broeck, Muriel; Maex, Karen (2001) -
Effect of implant oxide on ultra-shallow junction formation
Lindsay, Richard; Lauwers, Anne; Fruehauf, Jens; de Potter de ten Broeck, Muriel; Maex, Karen (2002) -
Electrical activity of B and As segregated at the Si-SiO2 interface
Fruehauf, Jens; Lindsay, Richard; Bergmaier, Andreas; Vandervorst, Wilfried; Tempel, Georg; Maex, Karen; Dollinger, Günther; Koch, Frederick (2002) -
Interfacial B-profiling: an (un)solvable problem with SIMS
Vandervorst, Wilfried; Janssens, Tom; Huyghebaert, Cedric; Brijs, Bert; Fruehauf, Jens (2002) -
Near-surface B/As profiling with SIMS: (in)solvable problems?
Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Fruehauf, Jens; Bergmaier, A.; Dollinger, G.; Vandenberg, J.A. (2003) -
(Un)solvable problems in SIMS
Vandervorst, Wilfried; Janssens, Tom; De Witte, Hilde; Conard, Thierry; Lindsay, Richard; Fruehauf, Jens; Loo, Roger; Caymax, Matty (2001)