Authors

Lindsay, Richard; Lauwers, Anne; Fruehauf, Jens; de Potter de ten Broeck, Muriel; Maex, Karen

Conference

6th Int. Workshop on Fabrication, Characterization and Modeling of Ultra-Shallow Doping Profiles in Semiconductors - USJ

Title

Effect of implant oxide on ultra-shallow junction formation

Publication type

Proceedings paper

Embargo date

9999-12-31