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Conference contributions
Effect of implant oxide on ultra-shallow junction formation
Publication:
Effect of implant oxide on ultra-shallow junction formation
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lindsay, Richard
;
Lauwers, Anne
;
Fruehauf, Jens
;
de Potter de ten Broeck, Muriel
;
Maex, Karen
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1960
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1960
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations