Browsing by author "Crane, R."
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Highly chemical reactive ion etching of gallium nitride
Karouta, F.; Jacobs, B.; Moerman, Ingrid; Jacobs, Koen; Weyher, J. L.; Nowak, G.; Crane, R.; Hageman, P. (2000) -
Highly chemical reactive ion etching of gallium nitride
Karouta, F.; Jacobs, B.; Moerman, I.; Jacobs, K.; Weyher, J.L.; Porowski, S.; Crane, R.; Hageman, P.R. (2000)