Highly chemical reactive ion etching of gallium nitride

Metadata

Show full item record

Authors

Karouta, F.; Jacobs, B.; Moerman, Ingrid; Jacobs, Koen; Weyher, J. L.; Nowak, G.; Crane, R.; Hageman, P.

Journal

MRS Internet Journal of Nitride Semiconductor Research

Volume

5S1

Title

Highly chemical reactive ion etching of gallium nitride

Publication type

Journal article

Collections

Articles