Browsing by author "Schuivens, Eugene"

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UV/ozone pre-treatment on organic contaminated wafer for complete oxide removal in HF vapour cleaning

Li, Li; Alay, Josep Lluis; Mertens, Paul; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc; De Blank, Rene; Schuivens, Eugene (1994)