Authors

Li, Li; Alay, Josep Lluis; Mertens, Paul; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc; De Blank, Rene; Schuivens, Eugene

Conference

Proceedings 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

UV/ozone pre-treatment on organic contaminated wafer for complete oxide removal in HF vapour cleaning

Publication type

Proceedings paper

Embargo date

9999-12-31