Browsing by author "Swaminathan, Karthik"
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Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen
Wostyn, Kurt; Kenis, Karine; Rondas, Dirk; Loo, Roger; Hikavyy, Andriy; Douhard, Bastien; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; Simpson, Gavin; Bast, Gerhard; Swaminathan, Karthik (2014)