Authors

Wostyn, Kurt; Kenis, Karine; Rondas, Dirk; Loo, Roger; Hikavyy, Andriy; Douhard, Bastien; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; Simpson, Gavin; Bast, Gerhard; Swaminathan, Karthik

Conference

SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices

Title

Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen

Publication type

Proceedings paper

Embargo date

9999-12-31