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Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen

Date

2014
Proceedings Paper
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dc.contributor.authorWostyn, Kurt
dc.contributor.authorKenis, Karine
dc.contributor.authorRondas, Dirk
dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorDouhard, Bastien
dc.contributor.authorMertens, Paul
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorSimpson, Gavin
dc.contributor.authorBast, Gerhard
dc.contributor.authorSwaminathan, Karthik
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorRondas, Dirk
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorSimpson, Gavin
dc.contributor.imecauthorBast, Gerhard
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-22T08:26:26Z
dc.date.available2021-10-22T08:26:26Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24834
dc.identifier.urlhttp://ecst.ecsdl.org/content/64/6/989.short?related-urls=yes&legid=ecst;64/6/989
dc.source.beginpage989
dc.source.conferenceSiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
dc.source.conferencedate5/10/2014
dc.source.conferencelocationCancun Mexico
dc.source.endpage995
dc.title

Evaluating SiGe-on-Si epitaxial quality by inline surface light scattering: a case study on the impact of interfacial oxygen

dc.typeProceedings paper
dspace.entity.typePublication
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