Browsing by author "Palov, A"

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Dependence of electric potential at trench surfaces on ion angula distribution in plasma etching processes

Palov, A; Mankelevich, Y; Rakhimova, T; Baklanov, Mikhaïl (2016)
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

Palov, A; Voronina, E; Rakhimova, T; Lopaev, D; Zyryanov, Sergey M.; Mankelevich, Yu; Krishtab, Mikhail; Baklanov, Mikhaïl (2016)