Authors

Palov, A; Voronina, E; Rakhimova, T; Lopaev, D; Zyryanov, Sergey M.; Mankelevich, Yu; Krishtab, Mikhail; Baklanov, Mikhaïl

ISSN

1071-1023

Issue

4

Journal

Journal of Vacuum Science and Technology B

Volume

34

Title

Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

Publication type

Journal article

Embargo date

9999-12-31