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Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
Publication:
Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
Date
2016
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Palov, A
;
Voronina, E
;
Rakhimova, T
;
Lopaev, D
;
Zyryanov, Sergey M.
;
Mankelevich, Yu
;
Krishtab, Mikhail
;
Baklanov, Mikhaïl
Journal
Journal of Vacuum Science and Technology B
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1912
since deposited on 2021-10-23
Acq. date: 2025-10-29
Citations
Metrics
Views
1912
since deposited on 2021-10-23
Acq. date: 2025-10-29
Citations