Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

dc.contributor.author	Palov, A
dc.contributor.author	Voronina, E
dc.contributor.author	Rakhimova, T
dc.contributor.author	Lopaev, D
dc.contributor.author	Zyryanov, Sergey M.
dc.contributor.author	Mankelevich, Yu
dc.contributor.author	Krishtab, Mikhail
dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.imecauthor	Krishtab, Mikhail
dc.date.accessioned	2021-10-23T13:30:19Z
dc.date.available	2021-10-23T13:30:19Z
dc.date.embargo	9999-12-31
dc.date.issued	2016
dc.identifier.issn	1071-1023
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/27113
dc.identifier.url	http://scitation.aip.org/content/avs/journal/jvstb/34/4/10.1116/1.4946838
dc.source.beginpage	41205
dc.source.issue	4
dc.source.journal	Journal of Vacuum Science and Technology B
dc.source.volume	34
dc.title	Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach
dc.type	Journal article
dspace.entity.type	Publication
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